안광덕 구덕일 정찬문 2024-01-21T22:02:14Z 2024-01-21T22:02:14Z 2022-01-10 1994-01 https://pubs.kist.re.kr/handle/201004/145766 Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists. Article 3 Journal of photopolymer science and technology, v.v. 7, no.no. 3, pp.473 - 482 Journal of photopolymer science and technology v. 7 no. 3 473 482 functional polymaleimides tosyloxymaleimide polymeric photoacid generator single-component resists chemical amplification resists photoresists