송진수 김영욱 김동주 최두진 이준근 2024-01-21T22:05:34Z 2024-01-21T22:05:34Z 2022-01-10 1994-01 1225-1372 https://pubs.kist.re.kr/handle/201004/145821 Low pressure chemical vapor deposition of silicon carbide 탄화규소의 저압 화학증착 Article 3 요업학회지 = Journal of the Korean Ceramic Society, v.31, no.3, pp.257 - 264 요업학회지 = Journal of the Korean Ceramic Society 31 3 257 264 silicon carbide chemical vapor deposition nicalon fiber composites