김용태 이창우 민석기 2024-01-21T22:39:12Z 2024-01-21T22:39:12Z 2022-01-10 1993-01 https://pubs.kist.re.kr/handle/201004/146153 Performance of the plasma deposited tungsten nitride diffusion barrier for Al and Au metallization. Article 3 Jpn. j. of appl. phys., v.v. 32, pp.6126 - 6131 Jpn. j. of appl. phys. v. 32 6126 6131