김태송 오명환 김종희 2024-01-21T23:14:07Z 2024-01-21T23:14:07Z 2022-01-10 1992-01 https://pubs.kist.re.kr/handle/201004/146513 Fabrication of ceramic thin films by PVD process PVD 공정에 의한 세라믹 박막의 제조 Article 3 Ceramics, v.7, no.3, pp.241 - 247 Ceramics 7 3 241 247 ceramics PVD process thin films