오태성 이창봉 이병찬 오영제 김윤호 2024-01-21T23:16:59Z 2024-01-21T23:16:59Z 2022-01-10 1992-01 https://pubs.kist.re.kr/handle/201004/146560 Dielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process Sol-gel 법으로 제조된 Ta2O5 박막의 유전특성과 누설전류 특성 Article 3 Journal of the Korean ceramic society = 한국요업학회지, v.29, no.1, pp.29 - 34 Journal of the Korean ceramic society = 한국요업학회지 29 1 29 34 sol-gel Ta2O5 thin film crystalline phase dielectric properties leakage current