하병주 주병권 차균현 오명환 김철주 2024-01-21T23:17:06Z 2024-01-21T23:17:06Z 2022-01-10 1992-01 https://pubs.kist.re.kr/handle/201004/146562 Microscopy study for the batch fabrication of silicon diaphragm 실리콘 diaphragm의 일괄 제조공정을 위한 microscopy study Article 3 전자공학회논문지, v.29A, no.1, pp.33 - 40 전자공학회논문지 29A 1 33 40 MEMS micromachining silicon etching diaphragm