AHN, KD LEE, YH KOO, DI 2024-01-21T23:38:01Z 2024-01-21T23:38:01Z 2022-01-10 1992-01 0032-3861 https://pubs.kist.re.kr/handle/201004/146690 A new t-BOC protected monomer, N-(tert-butyloxycarbonyl)maleimide (t-BOCMI) 3 was synthesized by thermolysis in a high yield and a new kind of t-BOC protected polymer was prepared by radical copolymerization. t-BOCMI and styrene derivatives (X-St) were readily copolymerized to obtain alternating copolymers of P(t-BOCMI/X-St) 5 in high conversions. The t-BOCMI units of the t-BOC protected copolymers were converted to the maleimide (MI) units by heating at about 150-degrees-C or above, releasing 2-methylpropene and carbon dioxide. The facile deprotection of the side-chain t-BOC groups from the protected copolymers was attained to bring about a large polarity change. The deprotected copolymers P(MI/Y-St) 6 have very high glass transition temperatures (T(g)s) of about 250-degrees-C and good solubility in aqueous base solutions, whereas the t-BOC polymers P(t-BOCMI//X-St) are only soluble in organic solvents. The t-BOC protected maleimide polymers were found to have specific properties for application as chemically amplified resist materials such as alkaline solubility, high T(g) and facile deprotection. English ELSEVIER SCI LTD COPOLYMERS RESISTS DESIGN SYNTHESIS AND POLYMERIZATION OF N-(TERT-BUTYLOXYCARBONYL)MALEIMIDE AND FACILE DEPROTECTION OF POLYMER SIDE-CHAIN T-BOC GROUPS Article 10.1016/0032-3861(92)90702-X 1 POLYMER, v.33, no.22, pp.4851 - 4856 POLYMER 33 22 4851 4856 scie scopus A1992JY84800029 2-s2.0-0037566185 Polymer Science Polymer Science Article COPOLYMERS RESISTS DESIGN N-(TERT-BUTYLOXYCARBONYL)MALEIMIDE T-BOC PROTECTED MALEIMIDE POLYMERS POLY[N-(T-BUTYLOXYCARBONYL)-MALEIMIDE)-CO-STYRENE] DEPROTECTION THERMAL STABILITY RESIST MATERIALS