김낙중 박수영 이기풍 송석규 2024-01-22T00:05:24Z 2024-01-22T00:05:24Z 2022-01-10 1991-01 https://pubs.kist.re.kr/handle/201004/146920 Plasma polymerization of hexamethyldisiloxane: effect of substrate temperature. Article 3 폴리머 = Polymer, v.v. 15, no.no. 1, pp.88 - ? 폴리머 = Polymer v. 15 no. 1 88 ? plasma polymerization plasma deposition glow discharge organosilicon