김용태 민석기 김충기 2024-01-22T00:08:22Z 2024-01-22T00:08:22Z 2022-01-10 1991-01 https://pubs.kist.re.kr/handle/201004/146969 A new method to suppress encroachment by plasma deposited tungsten thin films. Article 3 Appl. phys. lett., v.v. 59, pp.916 - 918 Appl. phys. lett. v. 59 916 918