Park, S.Y. Kim, N. Kim, U.Y. Hong, S.I. Sasabe, H. 2024-01-22T00:32:58Z 2024-01-22T00:32:58Z 2022-01-28 1990-01 0032-3896 https://pubs.kist.re.kr/handle/201004/147154 The chemical structure, density, and deposition rate of hexamethyldisilazane plasma polymer were investigated in terms of reaction conditions, such as discharge power (W) and mass flow rate (Fm). The importance of the specific energy per mass (W/Fm) as the major controlling parameter of plasma polymerization was confirmed in this study. A notable infiuence of W/Fm on the chemical structure corresponded with the changes in density and deposition yield of plasma polymer. Deposition rate equation was proposed from the simplified model of plasma polymerization. Regression analysis of the experimental data supported the equation. ？ 1990 The Society of Polymer Science, Japan. English Organometallics Plasmas Polymers--Synthesis Deposite Rate Hexamethyldisilazane Plasma Polymer Plasma Polymerization Organic Compounds Plasma polymerization of hexamethyldisilazane Article 10.1295/polymj.22.242 1 Polymer Journal, v.22, no.3, pp.242 - 249 Polymer Journal 22 3 242 249 scopus 2-s2.0-0025210251 Article Organometallics Plasmas Polymers--Synthesis Deposite Rate Hexamethyldisilazane Plasma Polymer Plasma Polymerization Organic Compounds Density Deposition rate Ftir Hexamethyldisilazane Organosilicon Plasma polymerization