김용태 김춘근 민석기 2024-01-22T01:02:56Z 2024-01-22T01:02:56Z 2022-01-10 1989-01 0374-4884 https://pubs.kist.re.kr/handle/201004/147433 Korean Physical Society Microwave plasma enhanced chemical vapor deposition of silicon nitride films. Article 2 Journal of the Korean Physical Society, v.22, pp.197 - 202 Journal of the Korean Physical Society 22 197 202