KIM, DW PARK, YJ LEE, JG CHUN, JS 2024-01-22T01:08:36Z 2024-01-22T01:08:36Z 2022-01-11 1988-11-15 0040-6090 https://pubs.kist.re.kr/handle/201004/147527 English ELSEVIER SCIENCE SA LAUSANNE TIC AND TIN COATINGS FORMED ON SI3N4-TIC COMPOSITE CERAMICS BY CHEMICAL VAPOR-DEPOSITION Article 10.1016/0040-6090(88)90686-4 1 THIN SOLID FILMS, v.165, no.1, pp.149 - 161 THIN SOLID FILMS 165 1 149 161 scie scopus A1988R411900014 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article