안광덕 S. R. Turner C. G. Willson 2024-01-22T01:38:54Z 2024-01-22T01:38:54Z 2022-01-10 1987-01 https://pubs.kist.re.kr/handle/201004/147809 Thermally stable, deep UV resist materials. Article 3 Polymers for high technology - electronics and photonics : ACS symposium series, v.v. 346, pp.200 - 210 Polymers for high technology - electronics and photonics : ACS symposium series v. 346 200 210