Kim Yong Tae S. P. Jeong D. J. Kim J. W. Park Min Suk-Ki 2024-02-21T05:06:12Z 2024-02-21T05:06:12Z 1996-01 https://pubs.kist.re.kr/handle/201004/148824 Nitrogen effects of Ta-Si-N diffusion barrier in Si/Cu metallization. Nitrogen effects of Ta-Si-N diffusion barrier in Si/Cu metallization. Book ? ? 한국물리학회 제 72 회 학술논문발표회