Park Young Ju K. Ozasa Y. Aoyagi 2024-02-21T05:07:12Z 2024-02-21T05:07:12Z 1995-02 https://pubs.kist.re.kr/handle/201004/148847 SP-CBE プラズマパスの발생とそれを용いた반도체표면반응の제어 Creation of high-peak plasma-pulses and control of surface reaction in short-pulsed chemical beam epitaxy. Book 11 14 이연シンポジウム제4회반응제어による표면가공기술