Kim Yong Tae D. J. Kim C. S. Kwon I. H. Choi Min Suk-Ki 2024-02-21T05:10:46Z 2024-02-21T05:10:46Z 1994-01 https://pubs.kist.re.kr/handle/201004/148929 Nitrogen implanted tungsten thin films for Cu diffusion barrier. Nitrogen implanted tungsten thin films for Cu diffusion barrier. Book ? ? 한국물리학회 제 69 회 학술논문 발표회