Kim Yong Tae S. J. Lee C. S. Kwon Y. W. Park C. C. Lee C. W. Lee Min Suk-Ki 2024-02-21T05:12:39Z 2024-02-21T05:12:39Z 1993-01 https://pubs.kist.re.kr/handle/201004/148972 Effects of nitrogen on the stress of plasma deposited tungsten and tungsten nitride thin films. Effects of nitrogen on the stress of plasma deposited tungsten and tungsten nitride thin films. Book ? ? 한국물리학회 제 67 회 학술논문 발표회