Kim Yong Tae C. S. Kwon I. H. Choi C. W. Lee Min Suk-Ki 2024-02-21T05:12:54Z 2024-02-21T05:12:54Z 1993-01 https://pubs.kist.re.kr/handle/201004/148978 Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films. Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films. Book ? ? 한국물리학회 제 67 회 학술논문 발표회