Chong, Minsu Rhee, Tae Gyu Khim, Yeong Gwang Jung, Min-Hyoung Kim, Young -Min Jeong, Hu Young Kim, Heung-Sik Chang, Young Jun Kim, Hyuk Jin 2024-07-11T06:30:08Z 2024-07-11T06:30:08Z 2024-07-11 2024-10 0169-4332 https://pubs.kist.re.kr/handle/201004/150217 In situ reflection high-energy electron diffraction (RHEED) is a powerful technique for monitoring surface states and offers invaluable insights into thin film growth. However, extracting hidden features and subtle changes from its vast data remains as a challenge. This work bridges the gap by employing machine learning (ML)empowered RHEED analysis to elucidate the growth dynamics of two-dimensional (2D) transition metal dichalcogenide (TMDC) thin films grown under two distinct growth modes. Principal component analysis (PCA) and its modified processes were used to separate contributions of the graphene substrate and the MoSe 2 film in the RHEED video. The ML -empowered RHEED analysis allowed us to effectively filter out the strong substrate signal and reconstructing RHEED videos solely for the MoSe 2 films. This approach enabled detailed monitoring of film growth with unique features, and clearly distinguishing between the layer -by -layer growth mode and the island one. This work demonstrates the potentials of ML -empowered RHEED analysis for revealing complex growth dynamics of 2D TMDC materials, paving the way for advanced thin film monitoring and autonomous control in wider scope of thin film technologies. English Elsevier BV Machine-learning-empowered identification of initial growth modes for 2D transition metal dichalcogenide thin films Article 10.1016/j.apsusc.2024.160547 1 Applied Surface Science, v.669 Applied Surface Science 669 N scie scopus 001260246700001 2-s2.0-85196666616 Chemistry, Physical Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Chemistry Materials Science Physics Article RHEED PATTERNS PEROVSKITES SURFACE ORIGIN RHEED Machine learning Principal component analysis Transition metal dichalcogenide Growth mode MBE