Geon-Hyeong Kang Jung, Ki Chul Kim, Jong bum Kang, Joon Hyun Kim, In Soo Kim, Young-Hwan 2024-01-12T02:35:25Z 2024-01-12T02:35:25Z 2022-11-22 2022-11 2079-6412 https://pubs.kist.re.kr/handle/201004/75939 In this study, we demonstrate the growth of high-quality KTa1-xNbxO3 (KTN) thin films by using multi-target radio frequency (RF) magnetron co-sputtering with KTaO3, KNbO3, and K2CO3 targets. KTaO3 and KNbO3 targets were used to control the Ta/Nb ratio while the K2CO3 target was used to supply excess potassium (K) to compensate for the K deficiency. Through careful control of the RF powers applied to each target, high-quality perovskite KTN (x = 0.53) thin films were grown on various single crystal substrates. Variable temperature Raman spectroscopy revealed that the KTN thin films exhibit a ferroelectric phase at room temperature with a Curie temperature of similar to 403 K. The optical constants n and k of the KTN thin film were also similar to those reported for single KTN crystals. These results present a simple route toward fabricating high-quality perovskite KTN thin films with desired structural and optical properties for various device applications utilizing the RF magnetron co-sputtering method. English MDPI AG Growth of High-Quality Perovskite KTa1-xNbxO3 Thin Films by RF Magnetron Co-Sputtering Article 10.3390/coatings12111787 1 Coatings, v.12, no.11, pp.1787 Coatings 12 11 1787 Y scie scopus 000894883300001 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article PULSED-LASER DEPOSITION REFRACTIVE-INDEX CRYSTALLIZATION BEHAVIOR ferroelectricity high-resolution X-ray diffraction potassium tantalate niobate RF magnetron co-sputtering Raman spectroscopy spectroscopic ellipsometry thin films