KIM YONGSOO Moon Byunghyuck Kim, Chulki Ju, Byeong-kwon Lee, Ju Han Jhon, Young Min 2024-01-12T03:31:13Z 2024-01-12T03:31:13Z 2022-04-27 2022-05 0030-3992 https://pubs.kist.re.kr/handle/201004/76735 We have developed a coherent and compact extreme-ultraviolet light source based on phase-matched high harmonic generation by using a hollow-core gas cell that can be easily aligned and maintain long stability. The gas cell consists of three bodies to minimize gas leakage and maintain stable vacuum. The photon flux was calculated considering the dependence of the gas number density and the pressure on the radii of the hollow core and the hole in the Al plates on both sides of the gas cell, which showed good coincidence with the experimental values. The photon flux is 2 x 10(10) photons s(-1) near 13.5 nm (91.5 eV) within 10 nm bandwidth. Also, the compact extreme-ultraviolet light source is found to operate stably for hours, which is suitable for practical applications such as metrology and inspection for extreme-ultraviolet mask, spectroscopy, holography, microscopy, etc. English Elsevier BV Optimizing high harmonic generation in hollow-core gas cell considering variation of gas density Article 10.1016/j.optlastec.2021.107803 1 Optics & Laser Technology, v.149 Optics & Laser Technology 149 N scie scopus 000806567100005 Optics Physics, Applied Optics Physics Article PHASE-MATCHED GENERATION ATTOSECOND PULSES RARE-GASES 13 NM COHERENT RADIATION FIELD DRIVEN High harmonic generation Coherent soft x-ray Extreme-ultraviolet Phase-matching