노형래 Jin soo Park 이찬기 Jeong Juyoung Jun Woo Choi Jeehoon Kim Hye Jung Chang Lee, Byung Chul 2024-01-12T04:10:46Z 2024-01-12T04:10:46Z 2021-09-29 2020-08 - https://pubs.kist.re.kr/handle/201004/77888 Magnetic skyrmions move fast under a condition of small current with protected topological property, so studying skyrmion dynamics is important for the spin-based devices. For this study, Lorentz transmission electron microscope (LTEM) is a powerful tool with a high resolution. Importantly, this enables us to analyze magnetization direction of skyrmions by using a transport-of-intensity equation (TIE) method. Also, we can study skyrmion dynamics using an in-situ TEM holder with MEMS-based chip. However, there was a problem when using a commercial chip because of stress on a multilayer. Here, we fabricated a MEMS chip with a bar-type multilayer for an in-situ TEM holder to study skyrmion dynamics using LTEM. Our home-made MEMS chip solves the problem of stress on the multilayer. Furthermore, this can be applied to other materials with various geometry, so we can apply this MEMS chip to other extensive researches. English 마이크로나노시스템학회 LTEM Skyrmion in-situ TEM holder MEMS chip SAFS Fabricating in-situ Lorentz TEM Holder MEMS Chip for Observation of Skyrmion Dynamics Lorentz TEM을 이용한 Skyrmion 동역학 관찰을 위한 in-situ TEM holder용 MEMS chip의 제작 Conference 2 제22회 한국MEMS 학술대회 제22회 한국MEMS 학술대회 KO 평창 2020-08-19