신경호 2024-01-12T04:35:49Z 2024-01-12T04:35:49Z 2005-04-27 https://pubs.kist.re.kr/handle/201004/78206 탄소박막　제조장치　및　방법 Patent 2005-04-27 2002-07-19 0487880 02-42521 KO 특허 한국과학기술연구원