Song, Sangmin Hyejun Hong Kim, Kyung Yeun Kim, Kyun Kyu Kim, Jaewoo Won, Daeyeon so young Yun Choi, Joonhwa Ryu Young In Lee, Kyungwoo Park Jae ho Kang, Joohyuk Bang, Junhyuk Seo, Hyunseon Kim, Yu-Chan Lee, Daeho Lee Hae Chang Lee, Jinwoo Hwang, Suk-Won Ko, Seung Hwan Jeon, Hojeong Lee, Wonryung 2024-01-12T06:32:41Z 2024-01-12T06:32:41Z 2023-11-17 2023-11 1936-0851 https://pubs.kist.re.kr/handle/201004/79761 Photolithography is a well-established fabrication method for realizing multilayer electronic circuits. However, it is challenging to adopt photolithography to fabricate intrinsically stretchable multilayer electronic circuits fully composed of an elastomeric matrix, due to the opacity of thick stretchable nanocomposite conductors. Here, we present photothermal lithography that can pattern elastomeric conductors and via holes using pulsed lasers. The photothermal-patterned stretchable nanocomposite conductor exhibits 3 times higher conductivity (5940 S cm？1) and 5 orders of magnitude lower resistance change (R/R0 = 40) under a 30% strained 5000th cyclic stretch, compared to those of a screen-printed conductor, based on the percolation network formed by spatial heating of the laser. In addition, a 50 μm sized stretchable via holes can be patterned on the passivation without material ablation and electrical degradation of the bottom conductor. By repeatedly patterning the conductor and via holes, highly conductive and durable multilayer circuits can be stacked with layer-by-layer material integration. Finally, a stretchable wireless pressure sensor and passive matrix LED array are demonstrated, thus showing the potential for a stretchable multilayer electronic circuit with durability, high density, and multifunctionality. English American Chemical Society Photothermal Lithography for Realizing a Stretchable Multilayer Electronic Circuit Using a Laser Article 10.1021/acsnano.3c06207 1 ACS Nano, v.17, no.21, pp.21443 - 21454 ACS Nano 17 21 21443 21454 N scie scopus 001104568400001 Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Chemistry Science & Technology - Other Topics Materials Science Article NANOPARTICLES TRANSPARENT NETWORK stretchable nanocomposites stretchable multilayer electroniccircuit photothermal lithography laser fabrication stretchable electronics