Kim, Y. Lee, H.J. Kim, D. Kim, Y.K. Lee, Soo Hyun Yoon, E.-S. Cho, I.-J. 2024-01-12T06:55:00Z 2024-01-12T06:55:00Z 2022-03-07 2013-06 0000-0000 https://pubs.kist.re.kr/handle/201004/80347 We present a multi-functional silicon neural probe that consists of a microfluidic channel for selective delivery of a precise quantity of a chemical and multiple recording electrodes to simultaneously monitor the effects of drug delivery. A 30-μm wide, 10-μm high microfluidic channel is embedded in the probe substrate by anodic bonding, thermal reflowing and polishing a glass wafer to seal the channel. 10-μm-by-10-μm four multiple recording sites are located near the outlet port to record neural spike signals in response to the delivered drug. The fabricated 150-μm-thick probe exhibits a flow rate of 0.2 μl/min at the input air pressure of 200 kPa and an average impedance value of 3.0 MΩ at 1 kHz. In addition, the functionality of this probe is demonstrated through an in vivo experiment where neural spike signals at the hippocampus of an anesthetized mouse are successfully detected and recorded. ？ 2013 IEEE. English IEEE A new MEMS neural probe integrated with embedded microfluidic channel for drug delivery and electrode array for recording neural signal Conference 10.1109/Transducers.2013.6626907 1 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp.876 - 879 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 876 879 US Barcelona 2013-06-16 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 2-s2.0-84891706812