CHO, IL JOO 2024-01-12T07:52:07Z 2024-01-12T07:52:07Z 2022-01-14 2007-11-15 https://pubs.kist.re.kr/handle/201004/81397 ASME Fabrication and Simulation of Nitride Cantilever for Low Power Nano-Data-Storage Conference 1 2007 ASME Interational Mechanical Engineering Congress and Exposition, pp.11 - 15 2007 ASME Interational Mechanical Engineering Congress and Exposition 11 15 US Mechanical Engineering Congress and Exposition