CHO, IL JOO 2024-01-12T07:53:30Z 2024-01-12T07:53:30Z 2022-01-14 2007-06-15 https://pubs.kist.re.kr/handle/201004/81459 ISPM Thermal characterization of silicon nitride cantileverf for low power nano data storage application Conference 2 International Scanning Probe Microscopy Conference International Scanning Probe Microscopy Conference KO International Scanning Probe Microscopy Conference