CHO, IL JOO 2024-01-12T07:56:40Z 2024-01-12T07:56:40Z 2022-01-14 2006-06-15 https://pubs.kist.re.kr/handle/201004/81603 IEEE Thermal analysis of microcantilevers integrated with heaters for low power nano-data storage application Conference 1 Asia-Pacific Conference of Transducers and Micro-Nano Technology Asia-Pacific Conference of Transducers and Micro-Nano Technology SI Asia-Pacific Conference of Transducers and Micro-Nano Technology