Park, Min Chul 2024-01-12T07:56:56Z 2024-01-12T07:56:56Z 2022-01-14 2006-06-01 https://pubs.kist.re.kr/handle/201004/81615 IEEE-NANO Inner Trench Type Tungsten Nano Dot Arrays Patterned by Using Diblock Copolymer Templates and Selective Ion Etching Conference 1 Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on US Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on