CHO, IL JOO 2024-01-12T08:14:50Z 2024-01-12T08:14:50Z 2022-01-14 2006-04-15 https://pubs.kist.re.kr/handle/201004/81932 NTFRL Study of PZT degradation during wafer-level bonding of thermo-piezoelectric cantilevers with CMOS wafer for probe-based data storage Conference 1 18th international symposium on integrated ferroelectrics 18th international symposium on integrated ferroelectrics US 18th international symposium on integrated ferroelectrics