CHO, IL JOO 2024-01-12T08:14:52Z 2024-01-12T08:14:52Z 2022-01-14 2006-04-15 https://pubs.kist.re.kr/handle/201004/81933 IUMRS Transfer of Si3N4 Cantilever Array on a CMOS Circuit Using New Wafer Level Bonding for Probe-Based Nano Data Storage Application Conference 1 MRS 2006 MRS 2006 US MRS 2006