CHO, IL JOO 2024-01-12T08:15:08Z 2024-01-12T08:15:08Z 2022-01-14 2006-01-15 https://pubs.kist.re.kr/handle/201004/81945 IEEE Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high density probe based data storage Conference 1 IEEE International Conference on MEMS, pp.247 - 250 IEEE International Conference on MEMS 247 250 TU IEEE International Conference on MEMS