CHO, IL JOO 2024-01-12T08:17:16Z 2024-01-12T08:17:16Z 2022-01-14 2005-05-15 https://pubs.kist.re.kr/handle/201004/82042 ETH Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensor for SPM DATA Storage Applications Conference 1 1st Korea-Switzerland Science & Technology 1st Korea-Switzerland Science & Technology SZ 1st Korea-Switzerland Science & Technology