Kim, Joon Kon 2024-01-12T08:19:29Z 2024-01-12T08:19:29Z 2022-01-14 2004-10-01 https://pubs.kist.re.kr/handle/201004/82142 A new device for indirect beam monitoring for large area ion implantation Conference 1 U. of North Texas, pp.0 U. of North Texas 0 0 Conference of Application of Accelerator in Research and Industry - 직접입력