나종갑 2024-01-12T08:35:25Z 2024-01-12T08:35:25Z 1999-09-21 https://pubs.kist.re.kr/handle/201004/82199 자성　박막　형성을　위한　스파터링　타겟　및　그　제조방법 Patent 1999-09-21 1997-02-25 5,955,685 08/805,742 US 특허 한국과학기술연구원