LEE, YEON HEE 2024-01-12T08:46:35Z 2024-01-12T08:46:35Z 2022-01-14 2003-09-01 https://pubs.kist.re.kr/handle/201004/82687 Plasma source ion implantation using high power pulsed RF plasma Conference 1 AVS, pp.0 AVS 0 0 International workshop on plasma-based ion implantation - 직접입력