CHO, IL JOO 2024-01-12T08:46:40Z 2024-01-12T08:46:40Z 2022-01-14 2003-08-15 https://pubs.kist.re.kr/handle/201004/82691 IEEE A Low-Voltage Three-Axis Electromagnetically Actuated Micromirror for High Coupling Efficiency Conference 1 Proceedings of IEEE International Conference on Optical MEMS, pp.123 - 124 Proceedings of IEEE International Conference on Optical MEMS 123 124 US Proceedings of IEEE International Conference on Optical MEMS