Moon, Sung Wook 2024-01-12T08:46:43Z 2024-01-12T08:46:43Z 2022-01-14 2003-08-01 https://pubs.kist.re.kr/handle/201004/82693 3D mems antenna for IR sensor using novel UV-lithography, plastic micro machining and mesh structure bonding technique Conference 1 IEEE, pp.0 IEEE 0 0 international conference on optical mems - 직접입력