CHOI, WON KOOK 2024-01-12T08:46:48Z 2024-01-12T08:46:48Z 2022-01-14 2003-08-01 https://pubs.kist.re.kr/handle/201004/82697 Surface smoothing and etching by gas cluster ion beam Conference 1 AIP, pp.745 - 749 AIP 745 749 Application of Accelerator in Reseach and Industry: 17th Int'l. Conf. - 직접입력