CHO, IL JOO 2024-01-12T09:16:39Z 2024-01-12T09:16:39Z 2022-01-14 2002-01-15 https://pubs.kist.re.kr/handle/201004/83317 IEEE A Low Voltage Two-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars Conference 1 Proceedings of IEEE the 15th International Conference on MEMS, pp.540 - 543 Proceedings of IEEE the 15th International Conference on MEMS 540 543 US Proceedings of IEEE the 15th International Conference on MEMS