Han, Dong Keun 2024-01-12T09:38:49Z 2024-01-12T09:38:49Z 2022-01-14 2002-01-01 https://pubs.kist.re.kr/handle/201004/83690 New antireflective coating materials for high resolution imaging in deep UV microlithography Conference 1 The Korean-Japan Joint Symposium on Imaging Materials and Technology