PARK, JONG YEON Kim, Kun Tae Moon, S. Park, J.-O. Oh, M.-H. Pak, J.J. 2024-01-12T09:40:08Z 2024-01-12T09:40:08Z 2022-03-10 2001-12 0277-786X https://pubs.kist.re.kr/handle/201004/83751 A 3D Feed horn shape MEMS antenna has some attractive features for array application, which can be used to improve microbolometer performance. Since MEMS technology have been faced many difficulties to fabrication of 3D feed horn shape MEMS antenna array itself. The purpose of this paper is to propose a new fabrication method to realize a 3D feed horn shape MEMS antenna array using a MRPBI(Mirror Reflected Parallel Beam Illuminator) system with an ultra-slow-rotated and inclined x-y-z stage. A high-aspect-ratio 300 μm sidewalls had been fabricated using SU-8 negative photo resist. It can be demonstrated to feasibility of realize 3D feed horn shape MEMS antenna array fabrication. In order to study the effect of this novel technique, the 3D feed horn shape MEMS antenna array had been simulated with HFSS(High Frequency Structure Simulator) tools and then compared with traditional 3D theoretical antenna models. As a result, it seems possible to use a 3D feed horn shape MEMS antenna at the tera hertz band to improve microbolometer performance and optical MEMS device fabrication. English SPIE Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer Conference 10.1117/12.448991 1 International Symposium on Microelectronics and MEMS, pp.377 - 387 International Symposium on Microelectronics and MEMS 377 387 US Adelaide, Australia 2001-12-17 Proceedings of SPIE - The International Society for Optical Engineering v.4592 2-s2.0-0035770369