Moon, Sung Wook 2024-01-12T10:07:40Z 2024-01-12T10:07:40Z 2022-01-14 2001-01-01 https://pubs.kist.re.kr/handle/201004/84197 A novel UV-LIGA process using PMER as a mold material for optical switch application Conference 1 International conference on Solid-State Sensors and Actuators