Moon, Sung Wook 2024-01-12T10:07:43Z 2024-01-12T10:07:43Z 2022-01-14 2001-01-01 https://pubs.kist.re.kr/handle/201004/84199 Fabrication Method of 3D Feed Horn Shape MEMS Antenna Array Using MRPBI System and Application for Microbolometer Conference 1 SPIE