Jeong, Jeung hyun 2024-01-12T10:08:16Z 2024-01-12T10:08:16Z 2022-01-14 2001-01-01 https://pubs.kist.re.kr/handle/201004/84224 An analytical model for intrinsic stress effect on out-of-plane deflection of a chemical vapor deposited thick films Conference 1 Materials Research Society, Boston, USA Materials Research Society, Boston, USA Materials Research Society Proceedings