Cho, Byung Won 2024-01-12T10:08:57Z 2024-01-12T10:08:57Z 2022-01-14 2001-01-01 https://pubs.kist.re.kr/handle/201004/84257 Lithium phosphorous oxy nitride(Lipon) 고체전해질 박막의 이온전도도에 미치는 RF sputtering power의 효과 = Effect of RF sputtering power in Lipon solid electrolyte ionic conductivity for thin film lithium rechargeable microbatteries Conference 2 , pp.0 0 0 한국전기화학회 학술발표회