CHO, IL JOO 2024-01-12T10:10:50Z 2024-01-12T10:10:50Z 2022-01-14 2000-08-15 https://pubs.kist.re.kr/handle/201004/84344 IEEE Micro Solid Immersion Lens Fabricated by Micro-Molding for Near-Field Optical Data Storage Conference 1 Proceedings of IEEE International Conference on Optical MEMS, pp.91 - 92 Proceedings of IEEE International Conference on Optical MEMS 91 92 US Proceedings of IEEE International Conference on Optical MEMS