Jeong, Jeung hyun 2024-01-12T10:12:25Z 2024-01-12T10:12:25Z 2022-01-14 2000-01-01 https://pubs.kist.re.kr/handle/201004/84418 Evaluation of residual stress in diamond film through advanced analytic model for substrate curvature method Conference 1 Gordon research conference on thin film mechanical behavior