Kim, Yong Tae 2024-01-12T10:41:40Z 2024-01-12T10:41:40Z 2022-01-14 1999-04-05 https://pubs.kist.re.kr/handle/201004/84933 Characteristics of molybdenum nitride thin film by N2 ion implantation Conference 1 , pp.0 0 0 MRS spring meeting