정일남 송철호 이규환 2024-01-12T11:00:57Z 2024-01-12T11:00:57Z 1995-05-12 https://pubs.kist.re.kr/handle/201004/85052 디실라알칸　화합물의　열분해에　의한　베타형　탄화규소　미세분말의　제조방법 Patent 1995-05-12 1992-03-21 84748 92-4705 KO 특허 한국과학기술연구원